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Another challenge faced is the formation of positive offset shorts.Ĭategory:Semiconductor device fabricationQ: For CMOS technologies, a homojunction is needed, so a bidirectional heterojunction is often used to get the benefits of the bidirectional properties. The main challenge faced by bidirectional substrates is the high formation temperature. Another one has been developed and is capable of allowing both electron and hole as well as both drain and source current directions. A bidirectional substrate used in MOSFET as an N-well and a P-well process has been developed by the Stanford team in 2005, which is capable of allowing both N-channel and P-channel, that are important requirements for CPU back-end-of-line (BEOL) processing. Such an ability makes bidirectional materials more stable and less prone to metal contamination in semiconductor fabrication processes.
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